Photoemission Studies of Effect of the Surface Oxygen on the GaAs-A1 and GaAsrAu Interface Using Synchrotron Radiation

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Photoemission Studies of Effect of the Surface Oxygen on the GaAs-A1 and GaAsrAu Interface Using Synchrotron Radiation

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- Photoemission Studies of Effect of the Surface Oxygen on the GaAs-A1 and GaAsrAu Interface Using Synchrotron Radiation
- Acta Scientiarum Naturalium Universitatis SunYatseni Vol. 26, Issue 2, Pages: 63-68(1987)
- 作者机构：
  
  1. 中山大学物理学系
  2. 南开大学物理学系
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：1987，
  
  Published Online：25 March 1987，
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Photoemission Studies of Effect of the Surface Oxygen on the GaAs-A1 and GaAsrAu Interface Using Synchrotron Radiation. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 26(2):63-68(1987)
DOI：

Photoemission Studies of Effect of the Surface Oxygen on the GaAs-A1 and GaAsrAu Interface Using Synchrotron Radiation. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 26(2):63-68(1987) DOI：

摘要

用同步辐射光电子谱研究了吸附于清洁的GaAs(110)解理面上的约0.7个单原子层的氧对Al—GaAs以及Au—GaAs界面形成的影响.初始淀积的铝(1ML)倾向于夺取As—O键中的氧

随后淀积的铝(>1ML)又从Ga—O键中夺取氧

形成Al—O键;Al的进一步增加使Al与次层GaAa的置换反应变得明显

其结果生成AlAs

同时被置换出来的Ga穿界面而出现在表面.微量的Au(<1ML)与O—GaAs之间只有微弱的相互作用.随后淀积的Au破坏As—O键并促使形成较稳定的Ga的氧化物

Ga的氧化物层阻止Ga进入Au

但不能阻止As分聚于Au层的表面.

Abstract

Using a soft x-ray photoemission spectroscopy (SXPS)

a chemical reaction is observed on the GaAs(110) surface with about 0.7 monolayer (ML) coverage of oxygen when Al is deposited at room temperature. The Al(<1ML)tendentiously reacts with surface oxygen bonded with As

then A1(>1ML) reacts with the others bonded with Ga

until all of the oxygen is consumed and additional Al replaces Ga in subsurface layers of the GaAs to form AlAs and drive Ga out across the interface. SXPS results show that on a similar oxygen covered surface only weak reaction is observed when Au deposition is below 1 ML. It is quite evident that additional Au (>1ML) disturbs the As-O bond and produces stable Ga oxide which inhibits the Ga below the oxide layer into Au

but As is segregated onto Au

关键词

&nbsp软X射线光电子谱金属-半导体界面

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Related Institution

Department of Chemistry,Zhongshan University

中国科学院华南植物研究所

中山大学计算机科学系

中山大学化学系

中山大学化学系 1980年分析化学专业毕业生

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